With the increase in speed, errors are generated for several reasons. Just to name a few:
1) The time available for each thought/movement contracts and, if it is not well coordinated, information relating to previous/subsequent thoughts/movements overlaps.
2) The time available to show oneself the outcomes of the moves about to be made, before actually making them, is reduced, resulting in a decrease in control.
3) The anxiety of not being able to do it increases, and anxiety and fear are classic (!) generators of errors.
4) ....................
5) ....................
The list is enormous and it would be impossible to compile it all, also because things that represent a difficulty for one person are a breeze for another, and even things that are difficult at a certain moment then, with practice or conscious effort, become easy (the opposite can even happen!).
For example, some time ago, without realizing it, I based part of my memory on fingering and, at the same time, on sequences. The two conflicted, because the former is lost as soon as you miss the synchronization of a finger, while the latter tends to make you change fingering depending on how you group the sequences. The solution? There isn't just one; you can also adopt the tactic of considering fingering secondary, you just have to not let yourself be distracted by the fact of discovering a finger on a note when we would prefer there to be another one.
Since I am not very good, I initially opted to prioritize fingering, which, however, tends to disappear from the mind if you do not play a piece for a long time. Now, being a little more prepared, I am approaching things differently, through phrasing.
So, what can I tell you: try to understand which aspect is bothering you.
In your case, I cannot understand if it is the scanning rhythm or the number of notes per second (or position changes) that is bothering you. These are two different things and require different remedies.
In general, I have found that many problems are solved by doing something else!
For example, a problem of errors in the sequence of notes can be solved by returning to solfège and re-reading the score, rather than repeating the offending measure (because, let's say, it wasn't a problem of incorrect memorization of the sequence, but of placement of accents, etc.).
In general, it is useful to have an adequate level of self-awareness and, for this reason, practice helps, but observing symptoms such as fatigue or anxiety also helps immensely; playing should be fun, not a torment.
Bye